PhD Position Amplitude & Phase Control in Optical Metrology
open universiteit · Delft, NL
What about shaping the future of optical metrology? Job description Optical metrology plays a critical role in semiconductor manufacturing by enabling non contact, high precision measurement of nanoscale features on chips, ensuring that critical dimensions and overlay accuracy meet the tolerances required for functional devices. As transistor geometries continue to shrink, the performance of optical metrology tools is continuously challenged by stricter requirements and increasingly complex geometries. In this project, you will work on the ideation, modeling, and experimental validation of novel techniques to address some of these challenges. You will join a research group with long standing expertise in coherent optical scatterometry, a method for measuring the shape of nanostructures by analyzing coherently scattered light from a target of interest. Within the project, you will investigate how to achieve full control over the amplitude and phase of the input probe, what additional constraints on the field can be derived from first principles, and how these constraints can improve the technique's performance, particularly when embedded in modern machine learning models. The ultima